Metric Ball Nuts
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Deposition Tool Load Frames
In advanced semiconductor deposition processes, including Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), and Atomic Layer Deposition (ALD), substrates must be precisely positioned within high-temperature, vacuum-sealed chambers. Load frame motion systems must provide rigid, repeatable support while withstanding thermal stress and harsh process conditions.
Support with Strength. Position with Precision. Perform Under Pressure.
Helix Linear Technologies delivers heavy-duty lead screws, ball screws, and linear actuators built to manage the robust demands of deposition tool load frames. Our motion components ensure stable, precise positioning of wafers, carriers, or platens inside the chamber to enable uniform coating and tight film thickness control across every substrate.
With customizable materials, coatings, and heat-resistant designs, Helix solutions integrate seamlessly into OEM systems for high-performance vacuum and plasma environments.
Key Benefits:
- High-force, rigid actuation for stable substrate support under load
- Heat- and corrosion-resistant materials for vacuum and plasma chambers
- Smooth, precise travel ensures uniform deposition coverage
- Configurable stroke lengths, drives, and mounting for OEM flexibility
Helix provides the motion that withstands the extremes to empower deposition systems to deliver consistent, nanoscale films with every run.
Product Groups
Stepper Motor Actuators
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Twin Lead Screws
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Lead Screws
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Custom Motion Components for Semiconductor OEMs
Helix Linear Technologies partners with semiconductor equipment OEMs to develop custom lead screws, ball screws, linear actuators, and guide systems tailored for the industry’s most demanding applications. Our components are engineered to resist harsh chemicals, and maintain sub-micron repeatability across millions of cycles.
Whether you’re building wafer processing equipment, automated inspection systems, or high-throughput backend packaging tools, Helix delivers the motion systems that keep semiconductor manufacturing precise, scalable, and future-ready.
Key Benefits:
✦ Sub-micron precision motion for wafer alignment, inspection, and bonding
✦ Cleanroom-compatible designs with low particle generation and dry lubrication
✦ Corrosion- and heat-resistant materials for vacuum, plasma, and chemical exposure
✦ Custom-engineered solutions to integrate seamlessly into OEM equipment
From lithography to laser dicing, Helix powers the motion behind the world’s most advanced semiconductor tools.
Testimonials
Precision That Powers Automation
"Your stepper motor linear actuators deliver unparalleled performance and precision, a game-changer for our automation needs."
Alan Perry, Stryker
Driving Innovation Through Collaboration
"The level of responsiveness from your sales engineer and the innovative engineering support provided during the purchase of our custom lead screw were outstanding. Our partnership has truly elevated our product development."
Ken Matthews, Johnson & Johnson
Expert Support for Complex Medical Engineering
"Your team's customer service went above and beyond, guiding us through the intricate process of custom ball screw engineering. The result? A precision-engineered ball screw that seamlessly integrated into our medical equipment, enhancing its reliability and performance. Kudos to your expertise and exceptional support.”"
John Sidlow, GE Medical
Precision That Powers Automation
"Your stepper motor linear actuators deliver unparalleled performance and precision, a game-changer for our automation needs."
Alan Perry, Stryker
Driving Innovation Through Collaboration
"The level of responsiveness from your sales engineer and the innovative engineering support provided during the purchase of our custom lead screw were outstanding. Our partnership has truly elevated our product development."
Ken Matthews, Johnson & Johnson
Expert Support for Complex Medical Engineering
"Your team's customer service went above and beyond, guiding us through the intricate process of custom ball screw engineering. The result? A precision-engineered ball screw that seamlessly integrated into our medical equipment, enhancing its reliability and performance. Kudos to your expertise and exceptional support.”"
John Sidlow, GE Medical
