Wafer Handling & Transfer Robots

In semiconductor fabrication, wafer handling and transfer robots are vital for moving delicate silicon wafers between process chambers with exceptional accuracy and cleanliness. These systems must operate within tight positional tolerances to avoid contamination, misalignment, or costly downtime.
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Move with Microns. Operate with Cleanroom Confidence.

Helix Linear Technologies supplies precision linear rails, lead screws, and actuators engineered for the demanding environments of semiconductor manufacturing. Our components enable smooth, repeatable wafer movement across vacuum chambers, load ports, and inspection tools to support robot arms, end-effectors, and indexing mechanisms with high rigidity and cleanroom compatibility.



With low-particle generation, minimal vibration, and customizable configurations, Helix motion systems help OEMs build wafer handling robots that deliver reliable throughput and pristine process control.



Key Benefits:



  • Sub-micron repeatability for wafer positioning accuracy
  • Low-friction motion minimizes particulate generation in cleanrooms
  • Corrosion-resistant, cleanroom-grade materials for high-purity environments
  • Configurable stroke lengths and footprints for multi-axis robotic integration





Helix provides the motion that keeps wafers moving and innovation advancing inside the world’s most advanced fabs.



Product Groups

Custom Motion Components for Semiconductor OEMs



Helix Linear Technologies partners with semiconductor equipment OEMs to develop custom lead screws, ball screws, linear actuators, and guide systems tailored for the industry’s most demanding applications. Our components are engineered to resist harsh chemicals, and maintain sub-micron repeatability across millions of cycles.



Whether you’re building wafer processing equipment, automated inspection systems, or high-throughput backend packaging tools, Helix delivers the motion systems that keep semiconductor manufacturing precise, scalable, and future-ready.



Key Benefits:



✦ Sub-micron precision motion for wafer alignment, inspection, and bonding

✦ Cleanroom-compatible designs with low particle generation and dry lubrication

✦ Corrosion- and heat-resistant materials for vacuum, plasma, and chemical exposure

✦ Custom-engineered solutions to integrate seamlessly into OEM equipment





From lithography to laser dicing, Helix powers the motion behind the world’s most advanced semiconductor tools.



Whitepaper
WHITEPAPERSEMICONDUCTORS

Solutions for Semiconductor Manufacturing

Precision Motion Systems for a Demanding Industry

Testimonials

Precision That Powers Automation

"Your stepper motor linear actuators deliver unparalleled performance and precision, a game-changer for our automation needs."

Alan Perry, Stryker
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Driving Innovation Through Collaboration

"The level of responsiveness from your sales engineer and the innovative engineering support provided during the purchase of our custom lead screw were outstanding. Our partnership has truly elevated our product development."

Ken Matthews, Johnson & Johnson
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Expert Support for Complex Medical Engineering

"Your team's customer service went above and beyond, guiding us through the intricate process of custom ball screw engineering. The result? A precision-engineered ball screw that seamlessly integrated into our medical equipment, enhancing its reliability and performance. Kudos to your expertise and exceptional support.”"

John Sidlow, GE Medical
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