Chemical Mechanical Polishing (CMP) Head Lifters

Chemical Mechanical Polishing (CMP) is essential for achieving wafer planarity in semiconductor manufacturing. During the process, polishing heads apply controlled force to remove microscopic layers and ensure surface flatness which is critical for multilayer circuitry. Precise vertical motion is required to apply uniform, repeatable pressure without damaging the wafer.
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Control Pressure. Maintain Flatness. Polish with Precision.

Helix Linear Technologies provides corrosion-resistant lead screws and actuators that deliver the fine force control and smooth vertical travel required for CMP head lifting systems. Our motion components enable precise adjustment of polishing head position and pressure across multiple wafers and cycles, helping to minimize variation and maximize yield.



Designed for harsh chemical environments and cleanroom compatibility, Helix solutions ensure consistent polishing results and long-lasting performance in CMP tools.



Key Benefits:



  • Precision actuation for accurate pressure and lift control
  • Corrosion-resistant materials withstand slurry exposure and chemicals
  • Smooth, stable motion ensures wafer planarity and prevents surface damage
  • Cleanroom-compatible construction for use in front-end fabs





Helix delivers the motion that enables surface perfection to support flawless finishes in every CMP cycle.



Product Groups

Custom Motion Components for Semiconductor OEMs



Helix Linear Technologies partners with semiconductor equipment OEMs to develop custom lead screws, ball screws, linear actuators, and guide systems tailored for the industry’s most demanding applications. Our components are engineered to resist harsh chemicals, and maintain sub-micron repeatability across millions of cycles.



Whether you’re building wafer processing equipment, automated inspection systems, or high-throughput backend packaging tools, Helix delivers the motion systems that keep semiconductor manufacturing precise, scalable, and future-ready.



Key Benefits:



✦ Sub-micron precision motion for wafer alignment, inspection, and bonding

✦ Cleanroom-compatible designs with low particle generation and dry lubrication

✦ Corrosion- and heat-resistant materials for vacuum, plasma, and chemical exposure

✦ Custom-engineered solutions to integrate seamlessly into OEM equipment





From lithography to laser dicing, Helix powers the motion behind the world’s most advanced semiconductor tools.



Whitepaper
WHITEPAPERSEMICONDUCTORS

Solutions for Semiconductor Manufacturing

Precision Motion Systems for a Demanding Industry

Testimonials

Precision That Powers Automation

"Your stepper motor linear actuators deliver unparalleled performance and precision, a game-changer for our automation needs."

Alan Perry, Stryker
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Driving Innovation Through Collaboration

"The level of responsiveness from your sales engineer and the innovative engineering support provided during the purchase of our custom lead screw were outstanding. Our partnership has truly elevated our product development."

Ken Matthews, Johnson & Johnson
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Expert Support for Complex Medical Engineering

"Your team's customer service went above and beyond, guiding us through the intricate process of custom ball screw engineering. The result? A precision-engineered ball screw that seamlessly integrated into our medical equipment, enhancing its reliability and performance. Kudos to your expertise and exceptional support.”"

John Sidlow, GE Medical
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