Metric Ball Nuts
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Etching Chamber Load Lock Systems
Etching chambers are central to defining circuit features in semiconductor devices, and load lock systems play a critical role in transitioning wafers between atmospheric and vacuum environments without contamination. These systems demand precise, ultra-clean motion to position wafers accurately and maintain vacuum integrity.
Seal Precisely. Transfer Cleanly. Perform Under Vacuum.
Helix Linear Technologies offers high-performance linear actuators and motion components engineered for use in vacuum-compatible load lock systems. Our lead screws and actuators provide reliable, repeatable wafer positioning with ultra-low particle generation to enable safe and efficient transfers in high-purity environments.
With stainless steel options, dry lubrication, and customizable configurations, Helix components are built to withstand extreme vacuum pressures and meet semiconductor-grade cleanliness requirements.
Key Benefits:
- High repeatability for accurate wafer transfer under vacuum
- Low outgassing and particle generation for contamination control
- Stainless and vacuum-compatible materials for chamber integrity
- Smooth, controlled motion supports pressure differentials and tight tolerances
Helix delivers the motion that protects your process to support clean, consistent wafer handling in every vacuum cycle.
Product Groups
Stepper Motor Actuators
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Twin Lead Screws
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Lead Screws
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Custom Motion Components for Semiconductor OEMs
Helix Linear Technologies partners with semiconductor equipment OEMs to develop custom lead screws, ball screws, linear actuators, and guide systems tailored for the industry’s most demanding applications. Our components are engineered to resist harsh chemicals, and maintain sub-micron repeatability across millions of cycles.
Whether you’re building wafer processing equipment, automated inspection systems, or high-throughput backend packaging tools, Helix delivers the motion systems that keep semiconductor manufacturing precise, scalable, and future-ready.
Key Benefits:
✦ Sub-micron precision motion for wafer alignment, inspection, and bonding
✦ Cleanroom-compatible designs with low particle generation and dry lubrication
✦ Corrosion- and heat-resistant materials for vacuum, plasma, and chemical exposure
✦ Custom-engineered solutions to integrate seamlessly into OEM equipment
From lithography to laser dicing, Helix powers the motion behind the world’s most advanced semiconductor tools.
Testimonials
Precision That Powers Automation
"Your stepper motor linear actuators deliver unparalleled performance and precision, a game-changer for our automation needs."
Alan Perry, Stryker
Driving Innovation Through Collaboration
"The level of responsiveness from your sales engineer and the innovative engineering support provided during the purchase of our custom lead screw were outstanding. Our partnership has truly elevated our product development."
Ken Matthews, Johnson & Johnson
Expert Support for Complex Medical Engineering
"Your team's customer service went above and beyond, guiding us through the intricate process of custom ball screw engineering. The result? A precision-engineered ball screw that seamlessly integrated into our medical equipment, enhancing its reliability and performance. Kudos to your expertise and exceptional support.”"
John Sidlow, GE Medical
Precision That Powers Automation
"Your stepper motor linear actuators deliver unparalleled performance and precision, a game-changer for our automation needs."
Alan Perry, Stryker
Driving Innovation Through Collaboration
"The level of responsiveness from your sales engineer and the innovative engineering support provided during the purchase of our custom lead screw were outstanding. Our partnership has truly elevated our product development."
Ken Matthews, Johnson & Johnson
Expert Support for Complex Medical Engineering
"Your team's customer service went above and beyond, guiding us through the intricate process of custom ball screw engineering. The result? A precision-engineered ball screw that seamlessly integrated into our medical equipment, enhancing its reliability and performance. Kudos to your expertise and exceptional support.”"
John Sidlow, GE Medical
