Metrology and Inspection XY Stages

In semiconductor manufacturing, metrology and inspection systems are the gatekeepers of yield to verify pattern alignment, layer thickness, and structural integrity at nanometer resolution. These systems rely on XY motion stages with ultra-smooth, backlash-free travel to position wafers or sensors accurately beneath high-resolution optical or electron beam systems.
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Cut Precisely. Align Confidently. Maximize Die Yield.

Helix Linear Technologies provides high-precision lead screws, ball screws, and linear guides designed to deliver stable, repeatable movement for inspection and metrology platforms. Our motion components support sub-micron step sizes, low vibration, and high straightness to ensure reliable defect detection and accurate measurement across every die.



Engineered for cleanroom environments and integration with advanced imaging tools, Helix solutions empower semiconductor OEMs to build XY stages that meet the most demanding precision requirements.



Key Benefits:



  • Backlash-free motion supports high-resolution camera accuracy
  • Smooth, consistent travel ensures reliable scanning and alignment
  • Sub-micron repeatability improves defect detection and dimensional control
  • Cleanroom-compatible materials and precision-ground components available





Helix delivers the motion that makes microscopic measurements possible to help semiconductor fabs maintain quality and scale with confidence.



Product Groups

Custom Motion Components for Semiconductor OEMs



Helix Linear Technologies partners with semiconductor equipment OEMs to develop custom lead screws, ball screws, linear actuators, and guide systems tailored for the industry’s most demanding applications. Our components are engineered to resist harsh chemicals, and maintain sub-micron repeatability across millions of cycles.



Whether you’re building wafer processing equipment, automated inspection systems, or high-throughput backend packaging tools, Helix delivers the motion systems that keep semiconductor manufacturing precise, scalable, and future-ready.



Key Benefits:



✦ Sub-micron precision motion for wafer alignment, inspection, and bonding

✦ Cleanroom-compatible designs with low particle generation and dry lubrication

✦ Corrosion- and heat-resistant materials for vacuum, plasma, and chemical exposure

✦ Custom-engineered solutions to integrate seamlessly into OEM equipment





From lithography to laser dicing, Helix powers the motion behind the world’s most advanced semiconductor tools.



Whitepaper
WHITEPAPERSEMICONDUCTORS

Solutions for Semiconductor Manufacturing

Precision Motion Systems for a Demanding Industry

Testimonials

Precision That Powers Automation

"Your stepper motor linear actuators deliver unparalleled performance and precision, a game-changer for our automation needs."

Alan Perry, Stryker
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Driving Innovation Through Collaboration

"The level of responsiveness from your sales engineer and the innovative engineering support provided during the purchase of our custom lead screw were outstanding. Our partnership has truly elevated our product development."

Ken Matthews, Johnson & Johnson
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Expert Support for Complex Medical Engineering

"Your team's customer service went above and beyond, guiding us through the intricate process of custom ball screw engineering. The result? A precision-engineered ball screw that seamlessly integrated into our medical equipment, enhancing its reliability and performance. Kudos to your expertise and exceptional support.”"

John Sidlow, GE Medical
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