Photolithography Stage Actuators

Photolithography is one of the most critical steps in semiconductor manufacturing, using UV light to transfer intricate circuit patterns onto silicon wafers. To achieve optimal resolution, the motion systems guiding the mask and wafer stages must deliver nanometer-level positioning with zero compromise in stability or repeatability.
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Align with Precision. Pattern with Confidence. Repeat with Sub-Micron Accuracy.

Helix Linear Technologies provides ultra-precise ball screws and linear actuators specifically designed for photolithography systems. Our motion components offer sub-micron resolution, low backlash, and ultra-smooth travel to ensure accurate alignment between mask and wafer throughout the exposure process.



Engineered for cleanroom operation and long-term mechanical stability, Helix motion solutions support OEMs designing the next generation of high-NA photolithography tools and steppers.



Key Benefits:



  • Sub-micron resolution for precise mask and wafer alignment
  • Smooth, vibration-free actuation to protect image integrity during exposure
  • Low-backlash ball screws engineered for long service life under constant cycling
  • Cleanroom-compatible materials and lubricants to meet semiconductor purity standards





Helix delivers the motion that defines the future of electronics where every circuit starts with perfect alignment.



Product Groups

Custom Motion Components for Semiconductor OEMs



Helix Linear Technologies partners with semiconductor equipment OEMs to develop custom lead screws, ball screws, linear actuators, and guide systems tailored for the industry’s most demanding applications. Our components are engineered to resist harsh chemicals, and maintain sub-micron repeatability across millions of cycles.



Whether you’re building wafer processing equipment, automated inspection systems, or high-throughput backend packaging tools, Helix delivers the motion systems that keep semiconductor manufacturing precise, scalable, and future-ready.



Key Benefits:



✦ Sub-micron precision motion for wafer alignment, inspection, and bonding

✦ Cleanroom-compatible designs with low particle generation and dry lubrication

✦ Corrosion- and heat-resistant materials for vacuum, plasma, and chemical exposure

✦ Custom-engineered solutions to integrate seamlessly into OEM equipment





From lithography to laser dicing, Helix powers the motion behind the world’s most advanced semiconductor tools.



Whitepaper
WHITEPAPERSEMICONDUCTORS

Solutions for Semiconductor Manufacturing

Precision Motion Systems for a Demanding Industry

Testimonials

Precision That Powers Automation

"Your stepper motor linear actuators deliver unparalleled performance and precision, a game-changer for our automation needs."

Alan Perry, Stryker
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Driving Innovation Through Collaboration

"The level of responsiveness from your sales engineer and the innovative engineering support provided during the purchase of our custom lead screw were outstanding. Our partnership has truly elevated our product development."

Ken Matthews, Johnson & Johnson
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Expert Support for Complex Medical Engineering

"Your team's customer service went above and beyond, guiding us through the intricate process of custom ball screw engineering. The result? A precision-engineered ball screw that seamlessly integrated into our medical equipment, enhancing its reliability and performance. Kudos to your expertise and exceptional support.”"

John Sidlow, GE Medical
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